MKS AX7685-33
MKS AX7685-33
MKS AX7685-33

MKS AX7685-33

High Efficiency and Output

The MKS AX7685-33 is designed to provide high reactant output, making it suitable for large chamber configurations and increased performance. It supports continuous operation and is not duty cycle limited 。

Versatile Gas Compatibility

The generator supports a variety of gases, including NF3, C3F8, and CF4, making it versatile for different reactive gas applications 。

Compact and Robust Design

The MKS AX7685-33 features a compact design with a lid-mountable remote plasma source, making it easy to integrate into existing systems. It is designed for robust operation with minimal maintenance 。
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Part number: MKS AX7685-33
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Description

Detailed Parameter Table

Parameter Name Parameter Value
Product Model MKS AX7685-33
Manufacturer MKS Instruments
Product Category Reactive Gas Generator
Type Remote Plasma Source
Gas Supply During Ignition 100% Ar
Gas Supply Post Ignition Up to 6 slm of NF3 (after plasma ignition NF3 can be added and the Ar removed)
NF3 Operation Reactant Output >95% dissociation up to 6 slm at 5 Torr (0.5 slm to 6.0 slm typical)
Operating Pressure 1-4 Torr during ignition, 1-10 Torr post ignition
Wetted Materials 6061-T6 Aluminum hardcoat anodized, 6061-T6 Aluminum, Chemraz®, Alumina
Control Interface 9 and 25 pin D connectors, opto-isolated I/O
Inputs On/Off
Outputs Ready, AC line, Plasma On
Power Requirements 187 to 228 VAC, 50/60 Hz, 60A, 3 phase
Cooling Water Required 2.0 gpm, < 30°C
Operating Temperature Ambient 40°C max
Dimensions 16.7” L x 14.5” W x 10.1” H (424 x 368 x 26 mm nominal)
Weight 74 lb. (33.5 kg)
Certifications CE, SEMI S2-0200, SEMI F47
MKS AX7685-33

MKS AX7685-33

Product Introduction

The MKS AX7685-33 is a high-output reactive gas generator designed for chamber cleaning and other reactive gas applications. It is part of the ASTRON® ex series, known for its patented Low-Field-Toroidal plasma technology that efficiently dissociates input gases to produce downstream reactive chemistries 。

Core Advantages and Technical Highlights

High Efficiency and Output

The MKS AX7685-33 is designed to provide high reactant output, making it suitable for large chamber configurations and increased performance. It supports continuous operation and is not duty cycle limited 。

Versatile Gas Compatibility

The generator supports a variety of gases, including NF3, C3F8, and CF4, making it versatile for different reactive gas applications 。

Compact and Robust Design

The MKS AX7685-33 features a compact design with a lid-mountable remote plasma source, making it easy to integrate into existing systems. It is designed for robust operation with minimal maintenance 。

MKS AX7685-33

MKS AX7685-33

Typical Application Scenarios

The MKS AX7685-33 is widely used in:
  • Semiconductor Manufacturing: For CVD chamber clean, FPD chamber clean, photoresist bulk ash, oxidation, nitridation, and abatement。
  • Research and Development: For high-flux reactive gas applications in laboratory settings。
  • Industrial Processes: For cleaning deposits from interior walls of process chambers using alternative gases。

Related Model Recommendations

  • MKS AX7685-32: A related model with similar specifications but different gas flow capabilities。
  • MKS AX7690: A higher-end model with enhanced features and capabilities。

Installation, Commissioning, and Maintenance Instructions

Installation Preparation

Ensure the environment meets the specified temperature and humidity requirements. Use appropriate tools and safety equipment to secure the generator in place. Connect the input and output cables according to the manufacturer’s guidelines 。

Maintenance Suggestions

Regularly inspect the generator for signs of wear or damage. Keep the unit clean and free from dust to prevent overheating and ensure efficient operation. Perform annual calibration checks and store calibration data in the module’s flash memory 。
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