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Detailed Parameter Table
| Parameter Name | Parameter Value |
|---|---|
| Product Model | MKS E28B-30200 |
| Manufacturer | MKS Instruments |
| Product Category | Vacuum Gauge |
| Measurement Range | 0.1 Torr |
| Accuracy | ±0.12% of reading |
| Sensor Type | Capacitance Manometer |
| Operating Temperature Range | 15°C to 50°C |
| Storage Temperature Range | -40°C to +85°C |
| Humidity Tolerance | 5% to 95% (non-condensing) |
| Dimensions | 100mm x 75mm x 20mm |
| Weight | 0.3 kg |
| Certifications | CE |
E28B-30200
Product Introduction
The MKS E28B-30200 is a high-precision vacuum gauge designed for measuring low-pressure environments. It is part of the Baratron® capacitance manometer series, known for its high accuracy and reliability in vacuum measurement applications.
Core Advantages and Technical Highlights
High Precision Measurement
The MKS E28B-30200 offers high accuracy with a measurement range of 0.1 Torr and an accuracy of ±0.12% of reading. This makes it suitable for precise vacuum measurements in various industrial applications.
Robust and Reliable Design
The gauge features a robust design with a wide operating temperature range of 15°C to 50°C and a storage temperature range of -40°C to +85°C. It is designed to withstand harsh industrial environments.
Versatile Communication Options
The MKS E28B-30200 supports multiple communication protocols, including Ethernet, making it easy to integrate into existing industrial systems.
Typical Application Scenarios
The MKS E28B-30200 is widely used in:
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Semiconductor Manufacturing: For precise vacuum control in etching and deposition processes.
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Research and Development: For accurate vacuum measurements in laboratory settings.
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Industrial Vacuum Systems: For monitoring and controlling vacuum levels in various industrial processes.
Related Model Recommendations
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MKS E28D-31865: A related model with a different measurement range and features.
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MKS 627B: Another model in the Baratron® series with a wider measurement range.
Installation, Commissioning, and Maintenance Instructions
Installation Preparation
Ensure the environment meets the specified temperature and humidity requirements. Use appropriate tools and safety equipment to secure the gauge in place. Connect the input and output cables according to the manufacturer’s guidelines.
Maintenance Suggestions
Regularly inspect the gauge for signs of wear or damage. Keep the unit clean and free from dust to prevent overheating and ensure efficient operation.
Service and Guarantee Commitment
The MKS E28B-30200 is backed by a comprehensive warranty and after-sales service commitment. MKS Instruments guarantees the quality of the product and provides a 12-month warranty period from the date of purchase.
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