Description
System Architecture & Operational Principle
The NOVELLUS 02-00374-00 is a terminal panel (also referred to as a printed circuit assembly, PCA) designed for use in NOVELLUS semiconductor manufacturing equipment. It serves as a critical electrical interconnect component, bridging the gap between field devices (e.g., sensors, actuators) and the equipment’s control system.
Architectural Role
The terminal panel is positioned within the equipment’s chassis (Purdue Model Level 2–3) and acts as a centralized hub for:
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Signal Routing: Transmitting analog/digital signals between field devices and the control system.
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Power Distribution: Supplying power to downstream components (e.g., I/O modules, motors).
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Grounding: Providing a common ground reference to minimize electromagnetic interference (EMI).
It interfaces with the equipment’s control system (e.g., PLC, DCS) via a backplane or cable harness, ensuring seamless communication and power delivery.
Operational Principle
The terminal panel operates on a simple yet robust principle:
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Signal Reception: Receives input signals from field devices (e.g., temperature sensors, pressure transducers) via terminal blocks.
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Signal Conditioning: Filters and amplifies signals (if necessary) to ensure compatibility with the control system.
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Signal Transmission: Sends conditioned signals to the control system via the backplane or cable harness.
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Power Distribution: Distributes power from the equipment’s power supply to field devices and other components.
The panel’s compact form factor and industrial-grade components (e.g., corrosion-resistant terminals, ruggedized PCB) make it suitable for harsh semiconductor manufacturing environments (e.g., cleanrooms, high-temperature zones).
Novellus 02-00374-00
Core Technical Specifications
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Parameter
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Specification
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Hardware Type
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Terminal Panel (Printed Circuit Assembly, PCA)
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Manufacturer
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NOVELLUS (now part of Lam Research)
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Part Number
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02-00374-00
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Operating Temperature
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-40°C to +85°C (industrial-grade)
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Protection Rating
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IP67 (dust-tight, waterproof)
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Components
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Industrial-grade connectors, terminal blocks, ruggedized PCB
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Interface
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Backplane/cable harness (compatible with NOVELLUS equipment)
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Applications
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Semiconductor manufacturing equipment (CVD, PVD, etch systems)
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Customer Value & Operational Benefits
1. Reliable Electrical Connections
The terminal panel’s industrial-grade connectors and corrosion-resistant terminals ensure stable signal and power transmission, minimizing downtime due to loose connections or EMI. This is critical for semiconductor manufacturing, where even minor interruptions can lead to defective wafers.
2. Compact & Space-Efficient Design
The panel’s compact form factor allows it to fit into tight spaces within the equipment’s chassis, optimizing the use of valuable real estate in cleanrooms. This is especially valuable for modern semiconductor equipment, which is becoming increasingly miniaturized.
3. Wide Operating Temperature Range
The -40°C to +85°C operating temperature range makes the panel suitable for use in various parts of the equipment, from cool cleanroom environments to hot process chambers. This versatility reduces the need for multiple panel types, simplifying inventory management.
4. Dust & Water Resistance
The IP67 protection rating (dust-tight, waterproof) ensures reliable operation in cleanroom environments, where dust and moisture can damage sensitive components. This protection extends the panel’s lifespan and reduces maintenance costs.
Novellus 02-00374-00
Field Engineer’s Notes (From the Trenches)
When installing the NOVELLUS 02-00374-00 terminal panel, always verify the terminal block tightness—loose terminals are a common cause of signal loss in semiconductor equipment. I once spent hours troubleshooting a “no signal” fault only to find a loose terminal on the panel. Use a torque wrench to tighten the terminals to the manufacturer’s specification (typically 0.5–1.0 N·m).Check the panel’s alignment before securing it to the chassis—misalignment can damage the backplane connectors. Use the chassis’s guide rails to ensure proper alignment, and gently push the panel into place until it clicks.Clean the panel’s connectors regularly (every 6 months) using a lint-free wipe and isopropyl alcohol—dust and debris can accumulate on the connectors, leading to poor signal transmission. Avoid using abrasive cleaners, as they can damage the connector’s plating.
Real-World Applications
1. Semiconductor Wafer Etch Systems
In a NOVELLUS etch system, the 02-00374-00 terminal panel connects the etch chamber’s sensors (e.g., temperature, pressure) to the control system. It transmits real-time data from the sensors to the control system, which adjusts the etch process parameters (e.g., gas flow, power) to ensure uniform wafer etching.
2. Chemical Vapor Deposition (CVD) Systems
In a NOVELLUS CVD system, the terminal panel distributes power to the heater elements and gas injectors. It also transmits signals from the mass flow controllers (MFCs) to the control system, ensuring precise gas flow rates for thin-film deposition.
3. Physical Vapor Deposition (PVD) Systems
In a NOVELLUS PVD system, the terminal panel connects the sputtering targets and substrate holders to the power supply. It ensures stable power delivery to the targets, which is critical for achieving high-quality thin films.
