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Detailed Parameter Table
| Parameter Name | Parameter Value |
|---|---|
| Product Model | AMAT 0190-17877 |
| Manufacturer | Applied Materials (AMAT) |
| Product Category | RF Generator |
| Power Output | 10.5 kW |
| Frequency | 13.56 MHz |
| Communication Protocols | Ethernet, RS-485 |
| Operating Temperature Range | 15°C to 50°C |
| Humidity Tolerance | 5% to 95% (non-condensing) |
| Dimensions | 450mm x 300mm x 200mm |
| Weight | 15 kg |
| Certifications | CE, UL |
AMAT 0100-71267
Product Introduction
The AMAT 0190-17877 is a high-power RF generator designed for industrial applications, particularly in semiconductor manufacturing. It is part of the MKS ENI B-10513 series, known for its reliability and high performance.
Core Advantages and Technical Highlights
High Power Output
The AMAT 0190-17877 provides a power output of 10.5 kW at a frequency of 13.56 MHz, making it suitable for demanding industrial applications.
Robust and Reliable Design
The generator features a robust design with a wide operating temperature range and high electromagnetic compatibility (EMC) standards, ensuring reliable operation in harsh industrial environments.
Versatile Communication Capabilities
The AMAT 0190-17877 supports multiple communication protocols, including Ethernet and RS-485, facilitating seamless integration with various industrial systems.
AMAT 0100-71267
Typical Application Scenarios
The AMAT 0190-17877 is widely used in:
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Semiconductor Manufacturing: For precise control of plasma processes in etching and deposition systems.
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Research and Development: For high-power RF applications in laboratory settings.
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Industrial Vacuum Systems: For powering RF plasma systems in various industrial processes.
Related Model Recommendations
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MKS ENI B-10513-00: A related model with similar specifications but different power output.
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MKS ENI B-10513-01: Another model in the same series with enhanced features.
Installation, Commissioning, and Maintenance Instructions
Installation Preparation
Ensure the environment meets the specified temperature and humidity requirements. Use appropriate tools and safety equipment to secure the generator in place. Connect the input and output cables according to the manufacturer’s guidelines.
Maintenance Suggestions
Regularly inspect the generator for signs of wear or damage. Keep the unit clean and free from dust to prevent overheating and ensure efficient operation.
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