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1. Product Description
2. Product Parameters
| Parameter | Details |
|---|---|
| Power Supply | Commonly supports common industrial power voltage ranges, generally 24V DC or 120V AC, etc. |
| Interface Types | Equipped with multiple interfaces for connection and communication with external devices. For example, analog input/output interfaces for connecting sensors and actuators; may also have digital communication interfaces such as RS485 for convenient data interaction with other control systems. |
| Compatibility | Can be used in conjunction with Woodward 2301, 500 series, or NetCon controllers. |
| Operating Temperature Range | Generally able to operate stably in an ambient temperature range of -20°C to 60°C. |
| Control Accuracy | The speed control accuracy can reach within ±0.1%. |
3. Advantages and Features
- High Reliability: Utilizing high-quality electronic components and advanced circuit designs, and having undergone strict testing and verification, Woodward 5501-003 can operate stably for a long time in harsh industrial environments. For instance, in the high-temperature, high-humidity, and strong electromagnetic interference environment of a power plant, it can still ensure the stable control of the steam turbine.
- Precise Control: Thanks to the powerful computing capabilities of its microprocessor and accurate control algorithms, Woodward 5501-003 can achieve high-precision speed control of the steam turbine. As mentioned before, the speed control accuracy can reach within ±0.1%, ensuring the stable operation of the equipment.
- Easy Configuration: Through the programming mode, users can conveniently set and adjust its internal parameters to adapt to different application scenarios and control requirements, without the need for complex hardware modifications. In a practical project, technicians were able to complete the parameter configuration of Woodward 5501-003 within a short time, saving a lot of time and effort.
4. Application Areas and Application Cases
- Application Areas: Widely applied in the energy industry for the control of steam turbines, such as the speed regulation of steam turbines in power plants to ensure power generation efficiency and power quality. It is also suitable for the petrochemical industry, controlling steam turbines that drive various pumps, compressors, and other equipment to ensure the stable operation of the production process.
- Application Case: In a large power plant, Woodward 5501-003 was used to control multiple steam turbines. Through its precise speed control, the steam turbines were able to maintain a stable speed under different load conditions, effectively improving power generation efficiency and reducing energy consumption. Moreover, during the long-term operation process, this controller demonstrated extremely high reliability, reducing maintenance costs and downtime, and bringing significant economic benefits to the power plant. The power generation efficiency increased by about 10% compared to before the application of Woodward 5501-003.
5. Comparison with Competitors
6. Selection Suggestions
- Compatibility: Ensure that the selected Woodward 5501-003 is compatible with existing steam turbine equipment and other control system components. For example, consider whether the interfaces and communication protocols match with the sensors, actuators, and upper-level control systems of the steam turbine.
- Installation Environment: Select according to the environmental conditions of the actual installation location, such as temperature, humidity, vibration, etc. If the installation environment is relatively harsh, a model with a higher protection level and environmental adaptability should be selected.
- Budget: Comprehensively consider the procurement cost, installation and debugging cost, and subsequent maintenance cost. Although Woodward 5501-003 has high performance and reliability, it is also necessary to ensure that its price is within the project budget.
7. Precautions
- Safety Specifications: During the installation and use process, it is necessary to strictly comply with relevant electrical safety specifications and operating procedures to ensure the personal safety of operators and the normal operation of the equipment. When making electrical connections, cut off the power supply first to avoid the risk of electric shock.
- Maintenance Suggestions: Regularly inspect and maintain Woodward 5501-003, clean dust and debris, and check whether the connection lines are loose. At the same time, calibrate and back up the controller’s parameters at the specified time intervals to prevent parameter loss or abnormality.
LAM 810-010412-001
Dual-Sensor Redundancy + Mixed Gas Compatibility
The module’s dual-sensor design (accuracy class 0.9 capacitance manometer + ionization gauge) ensures zero single-point failures, while 316L valves and 20% NF₃/CF₄ compatibility enable seamless switching between legacy inert gas and advanced fluorinated gas workflows. A Chinese mixed-process fab reported that this feature eliminated the need to swap modules between 45nm Ar deposition and 28nm 18% NF₃ etch tools, cutting changeover time by 40% (from 90 minutes to 54 minutes) and increasing daily throughput by 15%. The DLC coating on sensors also extends calibration intervals to 24 months (vs. 20 months for advanced entry-level modules), reducing maintenance costs by 20%.
Auto-Range Switching + Dynamic Transition Mode
Auto-range switching (250 ms response) and 60 Hz dynamic transition mode eliminate manual intervention and capture fast pressure transients — critical for 28nm etch where ±0.2×10⁻⁷ Torr spikes cause 3.5% yield loss. A Southeast Asian 28nm logic chip fab noted that the module reduced pressure overshoot during process transitions by 65% (from ±0.5×10⁻⁷ Torr to ±0.18×10⁻⁷ Torr), cutting etch CD variation by 32% (from ±0.6 nm to ±0.41 nm) and lifting wafer pass rates from 92% to 95.8%. The dynamic mode also uses predictive logic to pre-adjust valves based on historical pressure data, further stabilizing vacuum in high-throughput workflows.
Dual Software Compatibility + Smart Integration
Designed to work with both LAM PCS v5.0+ (legacy tools) and v6.5+ (advanced tools), the module requires no software reconfiguration when switching between workflows — avoiding \(8k–\)12k per tool in upgrade costs. A U.S. fab transitioning to 28nm reported that this feature saved $96k in software upgrades for 12 legacy LAM 790 tools. The 1 Gbps EtherNet/IP and OPC UA interfaces also enable real-time data transmission to MES, supporting automated process logging for 14nm–28nm quality compliance (e.g., IATF 16949 for automotive chips) and reducing manual data entry by 75%.
Full 12-month warranty on all components- Dedicated after-sales support
- Same-day dispatch on 1000s of parts
- All units are fully tested
Full 12-month warranty on all components- 1. Email confirmation
You will get an email confirming that we have received your enquiry. - 2. Dedicated Account Manager
One of our team will be in touch to confirm your part(s) specification and condition. - 3. Your quote
You will receive a comprehensive quote tailored to your specific needs.
