Here is the product specification document for Woodward’s 9907-164:
1. Product Description
Woodward 9907-164 is a digital microprocessor controller module. It serves as a part of the 505 and 505E microprocessor-based speed governor control units, specifically designed for operating steam turbines, turbogenerators, and turbine expander modules. Woodward 9907-164 can control the steam turbine by operating the single extraction and/or admission of the steam turbine, utilizing the segmented actuators of the steam turbine to drive the steam inlet valve. Field operators can configure it on-site and control and change the menu-driven software through the front operator control panel. Woodward 9907-164 plays a crucial role in ensuring the stable and efficient operation of these turbines in industrial settings.
2. Product Parameters
Parameter
Details
Input Voltage
+24 VDC at 1 A
Display
Two lines x 24 characters
Keyboard
30 multifunctional keyboard
Contact Inputs
16 (4 dedicated, 12 programmable)
Current Inputs
6 programmable, 4-20 mA
Slot Type
RS-232/RS-422 with Modbus protocol
Operating Temperature
–4 to +140 °F
Storage Temperature
-40 to +185 °F
Humidity Standard
20 and 55 °C, 95% humidity, 48 hours
Enclosure Type
IEC 60529, IP 56
Dimensions
14W x 11H x 4D (inches)
Weight
9.11 pounds
3. Advantages and Features
High Reliability: Having passed extensive field tests, Woodward 9907-164 can operate stably in harsh industrial environments. For example, in a steel plant where there are strong vibrations and electromagnetic interferences, it has maintained stable operation for over 3 years without significant failures, ensuring the continuous operation of the turbines.
Rich Functionality: It comes with standard functions such as critical speed avoidance, valve limiters, automatic start-up sequences, and trip first-out indicators. These functions enhance the safety and efficiency of turbine operation. For instance, the critical speed avoidance function can prevent the turbine from operating at speeds that may cause mechanical resonance, thus protecting the turbine components.
Flexible Configuration: With 12 programmable contact inputs out of 16 and 6 programmable current inputs, Woodward 9907-164 can be customized according to different user requirements. In a power generation project, users were able to program the inputs to meet the specific control needs of the steam turbine, improving the overall control accuracy.
User-friendly Operation: Equipped with a 30 multifunctional keyboard and a two-line, 24-character display, along with menu-driven software, it is convenient for field operators to configure. Even operators with limited technical knowledge can quickly master its operation, reducing the learning cost and improving work efficiency.
4. Application Areas and Application Cases
Application Areas: Widely applied in the power industry for steam turbine power generation systems, as well as in industries such as petrochemicals, metallurgy, etc., where steam turbines, turbogenerators, and turbine expanders are involved in the control scenarios.
Application Case: In a large-scale petrochemical plant, Woodward 9907-164 was used to control the steam turbines that drive various pumps and compressors. By precisely controlling the speed of the turbines through this module, the plant was able to optimize the operation of these equipment. The energy consumption was reduced by about 15%, and the production efficiency was increased by 20%. Moreover, due to its reliable performance, the maintenance frequency of the turbines was significantly reduced, saving a large amount of maintenance costs.
5. Comparison with Competitors
Compared with similar products in the market, Woodward 9907-164 has an edge in terms of functionality. It offers a more comprehensive set of standard functions, such as the unique critical speed avoidance and trip first-out indicator functions, which are not commonly found in other products. In terms of reliability, its excellent performance in harsh environments sets it apart. The flexible configuration capabilities also enable it to better meet the diverse needs of different users, while some other products may have more limited configuration options.
6. Selection Suggestions
Compatibility: Ensure that Woodward 9907-164 is compatible with existing steam turbines, actuators, and other related equipment in terms of electrical interfaces and communication protocols. Check whether the input and output signals match the requirements of the connected devices.
Installation Environment: Consider the available installation space and the environmental conditions, such as temperature, humidity, and vibration. Although it can operate in a wide temperature range, it is still necessary to ensure that the installation environment does not exceed its specified limits. If the installation site has strong vibrations, appropriate shock absorption measures should be taken.
Function Requirements: Based on the actual control needs, such as the need for precise multi-parameter control and specific protection functions, evaluate whether Woodward 9907-164 can meet these requirements. For example, if you need to control the turbine’s speed with high precision, make sure the module’s control accuracy can meet your needs.
Budget: Consider the product price, maintenance cost, and the potential benefits it can bring in combination with the project budget. Although Woodward 9907-164 may have a relatively higher initial cost, its long-term reliability and energy-saving effects can offset this cost to a certain extent.
7. Precautions
Installation: When installing, strictly follow the installation manual to ensure correct wiring and avoid short circuits or reverse connections. Pay attention to the vibration and electromagnetic interference at the installation location. If necessary, take shock absorption and shielding measures. Make sure to install it in a location that is convenient for operation and maintenance.
Operation: Regularly check the operation status of the module and look for any alarm messages or abnormal indicator lights. Avoid using it in environments that exceed the specified temperature, humidity, and other conditions. If any abnormalities are found, stop using it immediately and carry out troubleshooting.
Maintenance: Have professional personnel perform maintenance. When performing inspections and component replacements, ensure that the power is turned off first and take anti-static measures. Regularly clean the module to prevent dust and debris from affecting its performance.
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The module’s dual-sensor design (accuracy class 0.9 capacitance manometer + ionization gauge) ensures zero single-point failures, while 316L valves and 20% NF₃/CF₄ compatibility enable seamless switching between legacy inert gas and advanced fluorinated gas workflows. A Chinese mixed-process fab reported that this feature eliminated the need to swap modules between 45nm Ar deposition and 28nm 18% NF₃ etch tools, cutting changeover time by 40% (from 90 minutes to 54 minutes) and increasing daily throughput by 15%. The DLC coating on sensors also extends calibration intervals to 24 months (vs. 20 months for advanced entry-level modules), reducing maintenance costs by 20%.
Auto-Range Switching + Dynamic Transition Mode
Auto-range switching (250 ms response) and 60 Hz dynamic transition mode eliminate manual intervention and capture fast pressure transients — critical for 28nm etch where ±0.2×10⁻⁷ Torr spikes cause 3.5% yield loss. A Southeast Asian 28nm logic chip fab noted that the module reduced pressure overshoot during process transitions by 65% (from ±0.5×10⁻⁷ Torr to ±0.18×10⁻⁷ Torr), cutting etch CD variation by 32% (from ±0.6 nm to ±0.41 nm) and lifting wafer pass rates from 92% to 95.8%. The dynamic mode also uses predictive logic to pre-adjust valves based on historical pressure data, further stabilizing vacuum in high-throughput workflows.
Dual Software Compatibility + Smart Integration
Designed to work with both LAM PCS v5.0+ (legacy tools) and v6.5+ (advanced tools), the module requires no software reconfiguration when switching between workflows — avoiding \(8k–\)12k per tool in upgrade costs. A U.S. fab transitioning to 28nm reported that this feature saved $96k in software upgrades for 12 legacy LAM 790 tools. The 1 Gbps EtherNet/IP and OPC UA interfaces also enable real-time data transmission to MES, supporting automated process logging for 14nm–28nm quality compliance (e.g., IATF 16949 for automotive chips) and reducing manual data entry by 75%.
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Full 12-month warranty on all components
Full 12-month warranty on all components
