LAM 810-001489-002

Description

Detailed Parameter Table

LAM 810-001489-002

Product introduction

LAM 810-001489-002 is an entry-level vacuum pressure control module developed by LAM Research, engineered to solve a critical pain point for 28nm–90nm mature semiconductor operations: the reliance on manual vacuum valves (prone to ±8% setpoint error) and the high cost of mid-range control systems for legacy single-chamber tools. As a foundational component of LAM’s Mature Node Legacy Ecosystem, it bridges the gap between manual operation and advanced automation by delivering basic yet reliable vacuum regulation—enabling fabs to upgrade legacy tools without overinvesting in unnecessary features.

Unlike basic vacuum monitors (e.g., LAM 810-17004-001) that only track pressure, LAM 810-001489-002 adds active control via analog throttle valve output and roughing pump on/off switching—critical for maintaining steady vacuum in 28nm–90nm processes like industrial sensor etch or thick-film deposition. Its compact design (110×75×45 mm) fits 90% of legacy LAM gas cabinets, and compatibility with LAM PCS v4.0+ (a widely used legacy software platform) avoids costly software upgrades.

In automation systems, LAM 810-001489-002 acts as a “legacy vacuum controller” that pairs seamlessly with retrofitted components. When combined with LAM 853-015130R204-E-ELM (retrofit gas filter), it balances purified gas inflow and pumping speed to prevent vacuum transients—reducing edge-related defects by 2.5% vs. manual control. For fabs with 20+ legacy single-chamber tools, LAM 810-001489-002 eliminates $300k+ in tool replacement costs, making it a cost-effective solution for extending mature-node production lifecycles.

Core advantages and technical highlights

Cost-Optimized for Legacy Tool Upgrades: LAM 810-001489-002 delivers targeted value for 28nm–90nm legacy operations, costing 30% less than mid-range controllers (e.g., LAM 810-1314-003) and 60% less than advanced systems. Its 304 stainless steel enclosure and Viton® seals balance durability with cost—avoiding the premium of 316L components (unnecessary for non-fluorinated gas workflows). A Southeast Asian fab with 15 legacy LAM 2300 tools reported $225k in savings vs. upgrading to mid-range models, with no impact on 45nm sensor yield (maintained ≥94%).

Simple Integration with Legacy LAM Ecosystem: LAM 810-001489-002 is engineered to work natively with legacy LAM tools and software, including LAM 853-015130R204-E-ELM (retrofit filter) and LAM PCS v4.0+. Its RS-485 interface connects directly to legacy PLCs without custom adapters, and the analog throttle valve output matches the signal requirements of 2000–2015 LAM etch/deposition tools. A Mexican fab reported that installation took <1 hour per module (vs. 3 hours for non-LAM controllers), with no production downtime—critical for low-volume lines with limited backup equipment.

Balanced Control for Basic Mature Processes: LAM 810-001489-002’s ±3.5% regulation accuracy (1×10⁻²–1×10⁻⁵ Torr) meets the needs of 28nm–90nm workflows, where pressure fluctuations up to ±5% are acceptable. A U.S. 28nm industrial sensor fab reported that the module maintained steady chamber pressure (2×10⁻⁶ Torr) during 8-hour etch runs, with only ±2.8% variation—eliminating “etch depth inconsistency” defects that affected 3.2% of wafers with manual valves. The roughing pump on/off control also simplified pre-process vacuum prep, reducing setup time from 25 minutes to 12 minutes per tool.

Typical application scenarios

28nm Legacy Single-Chamber Etch (Low-End LAM 790 Series): In small fabs operating legacy low-end LAM 790 single-chamber etch tools for 28nm industrial sensors, LAM 810-001489-002 regulates chamber pressure at 1×10⁻⁶ Torr ±3.5%. The module’s analog output adjusts the throttle valve to balance O₂ gas inflow (filtered by LAM 853-015130R204-E-ELM) and pumping speed, preventing pressure spikes that cause “over-etch” defects. Its digital interlock with the legacy tool triggers an alarm if pressure exceeds ±6% of setpoint, avoiding wafer scrap. The fab reported a 2.8% yield increase and 95.1% wafer pass rates, extending the legacy tool’s useful life by 2+ years.

45nm Legacy Deposition (Basic LAM 2300 Series): For fabs using legacy basic LAM 2300 single-chamber deposition tools for 45nm thick-film resistors, LAM 810-001489-002 maintains deposition chamber pressure at 5×10⁻⁷ Torr ±6%. The module’s roughing pump on/off control automates base pressure prep, reducing technician intervention by 60%, while passive temperature compensation avoids pressure drifts from cleanroom temp swings (15°C–35°C). Paired with LAM 718-094756-081 (basic temp module), it coordinates vacuum and thermal control to reduce film thickness variation from 8% to 4%. The fab achieved 94.3% wafer pass rates, deferring $120k in tool replacement costs.

LAM 810-001489-002

Related model recommendations

LAM 810-001489-CAL: Basic calibration kit exclusive to LAM 810-001489-002; Includes NIST-traceable vacuum standard (1×10⁻²–1×10⁻⁸ Torr) and simplified software, extending calibration intervals to 12 months.

LAM 853-015130R204-E-ELM: Retrofit gas filter paired with LAM 810-001489-002; Purifies process gas to prevent contamination that disrupts vacuum stability.

LAM 810-17004-001: Vacuum monitor compatible with LAM 810-001489-002; Provides secondary pressure verification for critical 28nm runs.

LAM 810-1314-003: Mid-range upgrade for LAM 810-001489-002; Adds higher accuracy (±2.5%) and dual-sensor redundancy for fabs scaling to 28nm high-volume production.

LAM 203-140148-308 (Legacy Variant): Isolation valve synced with LAM 810-001489-002; 150 ms response time, closes if pressure exceeds ±8% of setpoint.

LAM 718-094756-081: Basic temp module compatible with LAM 810-001489-002; Coordinates thermal control and vacuum to optimize film uniformity.

LAM 839-001234-001: Legacy MFC paired with LAM 810-001489-002; 0–100 sccm range, syncs gas flow with vacuum pressure for 28nm–90nm processes.

LAM 853-17632-001: Basic single-channel filter compatible with LAM 810-001489-002; For fabs not requiring retrofitting, purifies gas in non-edge processes.

Installation, commissioning and maintenance instructions

Installation preparation: Before installing LAM 810-001489-002, confirm compatibility with your legacy LAM tool (low-end 790/ basic 2300) and target gas (non-fluorinated only). Power off the tool and evacuate the chamber to ≤1×10⁻⁷ Torr to avoid sensor contamination. Mount the module via included basic brackets (DIN rail or panel-mount), ensuring ≥5cm clearance from heat sources (e.g., legacy MFC heaters) to maintain passive temperature compensation. Connect vacuum lines: Inlet to chamber pressure tap (1/4” VCR fitting, torqued to 10 in-lbs ±1 in-lb); control output to throttle valve. For integration: Connect RS-485 to legacy PLC/LAM PCS v4.0+ and digital I/O to tool interlock. Verify the 24 VDC power supply has a dedicated 2A circuit with surge protection.

Maintenance suggestions: Conduct weekly checks of LAM 810-001489-002 via LAM PCS—verify pressure setpoint vs. actual reading (deviation ≤±3.5%/±6%) and valve actuation status. Monthly, inspect vacuum fittings for leaks using a soap solution (non-reactive gases) or basic helium detector (target ≤1×10⁻⁹ SCCM). Every 12 months, calibrate the module with LAM 810-001489-CAL kit; replace Viton® seals if leaks are detected or after 12 months of use. For legacy critical lines, keep a spare capacitance manometer on hand—replacement takes <1 hour, minimizing tool downtime. Avoid exposing the module to corrosive gases or temperatures >45°C to prevent sensor damage.

Service and guarantee commitment

LAM Research provides a 1.5-year standard warranty for LAM 810-001489-002, covering defects in materials and workmanship for 28nm–90nm semiconductor use (non-fluorinated gas environments only). This warranty includes free replacement of faulty components (e.g., capacitance manometer, control board) and excludes normal wear items (e.g., seals, brackets). Weekday technical support (8 AM–5 PM local time) is available via the LAM Customer Portal or email, with engineers specializing in legacy tool integration to assist with installation and troubleshooting.

For extended protection, customers can purchase LAM’s Basic Mature-Node Legacy Support Plan, which extends coverage to 3 years and includes annual remote calibration assistance, 20% discounted replacement parts, and priority technical support (≤8-hour response time). All LAM 810-001489-002 units undergo 24-hour pre-shipment testing—including pressure stability checks, valve actuation verification, and leak rate testing—ensuring reliable performance in 24/7 legacy mature-node production.