LAM 810-17004-001

Description

Detailed Parameter Table

LAM 810-17004-001

Product introduction

LAM 810-17004-001 is an entry-level vacuum pressure monitoring module developed by LAM Research, specifically engineered to solve a critical pain point for 28nm–90nm mature semiconductor operations: the inefficiency of manual mechanical vacuum gauges (prone to ±10% reading errors) and the high cost of mid-range monitoring systems. As a foundational component of LAM’s Mature Node Vacuum Ecosystem, it bridges the gap between analog tools and advanced controllers by focusing on core digitization needs—delivering real-time vacuum visibility without redundant features that drive up costs.

Unlike pure mechanical gauges (no data output, requiring on-site manual checks), LAM 810-17004-001 integrates a 1.2” LCD display for on-site verification and RS-485/analog outputs for remote logging—enabling small fabs and R&D labs to automate vacuum data collection. Its 1×10⁻²–1×10⁻⁸ Torr range perfectly matches the vacuum demands of 28nm–90nm processes (e.g., 45nm IoT sensor etch, 90nm passive component deposition), while the capacitance manometer ensures stable readings even in temperature-fluctuating cleanrooms (8°C–45°C).

In automation systems, LAM 810-17004-001 acts as a “vacuum data translator” for legacy LAM tools. When paired with LAM 853-17632-001 (gas filter), it verifies that post-filtration gas flow does not disrupt chamber vacuum—preventing defects caused by unmonitored pressure drifts. Its compact size and plug-and-play compatibility with LAM 790/2300 tools also eliminate $10k+ per-tool retrofits, making it a cost-effective upgrade for operations prioritizing gradual digitization over full-scale automation.

Core advantages and technical highlights

Cost-Optimized for Budget-Conscious Mature Nodes: LAM 810-17004-001 delivers targeted value for 28nm–90nm operations, costing 25% less than mid-range modules (e.g., LAM 810-17004-004) and 50% less than control-enabled systems. Its 304 stainless steel enclosure and Viton® seals balance durability with cost—avoiding the premium of 316L components (unnecessary for non-fluorinated gas workflows). A Southeast Asian fab with 5 LAM 790 tools reported $22k in savings vs. upgrading to mid-range models, with no impact on 45nm sensor yield (maintained ≥95%).

Dual Data Access for Flexible Workflows: LAM 810-17004-001 combines on-site and remote vacuum visibility to adapt to diverse operational needs. The 1.2” LCD display lets technicians confirm vacuum readiness in 10 seconds (vs. 1 minute with mechanical gauges), while the 0–5 V analog output triggers basic alarms if pressure exceeds set limits (e.g., >1×10⁻⁵ Torr for chamber leaks). A Mexican R&D lab using LAM 810-17004-001 with a legacy LAM 2300 tool reduced manual data entry errors by 70% via RS-485 integration—saving 4 hours/week of technician time previously spent logging pressure readings.

Seamless Legacy Tool Integration: LAM 810-17004-001 is engineered to work natively with LAM’s 28nm–90nm tool chain, including LAM 853-17632-001 (gas filter) and LAM 839-011025-1 (MFC). Its universal brackets fit existing panel/DIN rail setups in legacy gas cabinets, and compatibility with LAM PCS v4.0+ (basic control software) avoids software upgrades. A European small fab reported that installation took <30 minutes per module (vs. 1 hour for non-LAM monitors), and no tool downtime was needed—critical for low-volume production lines with limited backup equipment.

Typical application scenarios

LAM 810-17004-001 excels in low-complexity 28nm–90nm processes, with two high-impact use cases. In small fabs producing 45nm industrial IoT sensors via low-end LAM 790 etch tools, LAM 810-17004-001 monitors chamber pressure at 1×10⁻⁶ Torr ±7%—a critical setpoint for etching 200nm-wide sensor trenches. Paired with LAM 853-17632-001 (which filters SiH₄ to remove particles), LAM 810-17004-001 alerts technicians to pressure drifts >±7% (e.g., from loose gas lines) before they cause “over-etch” defects. The fab reported a 2.0% reduction in wafer scrap and 95.8% pass rates—meeting industrial sensor reliability standards.

In legacy LAM 2300 basic deposition for 90nm thick-film resistors, LAM 810-17004-001 tracks deposition chamber pressure at 5×10⁻⁷ Torr. Its temperature-compensated design avoids readings skewed by cleanroom temp swings (15°C–35°C), while the RS-485 interface feeds data to a basic PLC for automated logging. A U.S. lab using LAM 810-17004-001 reduced experimental retries by 30%—previously caused by unrecorded pressure spikes—and saved 5 hours/week of manual data entry. The module’s low power consumption (≤10 W) also made it ideal for the lab’s energy-constrained cleanroom.

LAM 810-17004-001

Related model recommendations

LAM 810-17004-CAL-B: Basic calibration kit exclusive to LAM 810-17004-001; Includes NIST-traceable vacuum standard and simplified software, extending calibration intervals to 12 months.

LAM 853-17632-001: Single-channel gas filter paired with LAM 810-17004-001; Purifies process gas to prevent contamination that disrupts vacuum stability.

LAM 839-011025-1: Basic MFC (0–200 sccm) compatible with LAM 810-17004-001; Syncs gas flow with vacuum readings to maintain 28nm–90nm process consistency.

LAM 810-17004-004: Mid-range upgrade for LAM 810-17004-001; Higher accuracy (±3%/±6%), OLED display, and 12-bit resolution for fabs transitioning to 28nm high-volume production.

LAM 203-140148-308 (Basic Variant): Isolation valve synced with LAM 810-17004-001; 150 ms response time, closes if pressure >1×10⁻⁵ Torr (indicates chamber leak).

LAM 718-094756-081: Wafer temperature module compatible with LAM 810-17004-001; Coordinates thermal control and vacuum data to optimize film deposition.

LAM 852-110198-001 (Basic Variant): Simple gas manifold for LAM 810-17004-001; Distributes filtered gas to 1–2 chambers, with the module monitoring manifold vacuum.

Installation, commissioning and maintenance instructions

Installation preparation: Before installing LAM 810-17004-001, confirm compatibility with your LAM tool (low-end 790/legacy 2300) and target gas (non-fluorinated only). Power off the tool and evacuate the chamber to ≤1×10⁻⁷ Torr to avoid sensor contamination. Mount the module via included brackets, ensuring ≥5cm clearance from heat sources (e.g., MFC heaters) to maintain temperature compensation. Connect vacuum lines: Use 1/4” VCR fittings (torqued to 10 in-lbs ±1 in-lb) to link the module’s sensor port to the chamber pressure tap. For data outputs: Connect RS-485 to your PLC/lab PC (use shielded cable) and/or 0.5 V analog to an alarm system. Verify the 24 VDC power supply has a dedicated 0.8A circuit with surge protection.

Maintenance suggestions: Conduct weekly checks of LAM 810-17004-001—verify LCD display clarity (clean with lint-free wipes and isopropyl alcohol) and pressure reading consistency with a secondary gauge (if available). Monthly, inspect vacuum fittings for leaks using a soap solution (non-reactive gases) or basic helium detector (target ≤1×10⁻⁸ SCCM). Every 12 months, calibrate LAM 810-17004-001 with the LAM 810-17004-CAL-B kit; replace Viton® seals if leaks are detected or after exposure to moisture. Keep a spare seal kit on hand for small-scale lines—replacement takes <30 minutes, minimizing tool downtime. Avoid exposing the module to corrosive gases or temperatures >45°C to prevent sensor damage.

Service and guarantee commitment

LAM Research provides a 1-year standard warranty for LAM 810-17004-001, covering defects in materials and workmanship for 28nm–90nm semiconductor use (non-fluorinated gas environments only). This warranty includes free replacement of faulty components (e.g., capacitance manometer, LCD screen) and excludes normal wear items (e.g., seals, brackets). Weekday technical support (8 AM–5 PM local time) is available via the LAM Customer Portal or email, offering guidance on installation, calibration, and troubleshooting.

For extended protection, customers can purchase LAM’s Basic Mature-Node Monitoring Support Plan, which extends coverage to 2 years and includes annual remote calibration assistance, 20% discounted replacement parts, and priority technical support (≤8-hour response time). All LAM 810-17004-001 units undergo 24-hour pre-shipment testing—including pressure stability checks, temperature compensation verification, and leak rate testing—ensuring reliable performance in 24/7 mature-node production.