LAM 685-094680-001

Description

Detailed Parameter Table

LAM 685-094680-001

Product Introduction

The LAM 685-094680-001 is a critical RF matching network capacitor engineered by LAM Research—an industry leader in semiconductor manufacturing equipment—specifically to optimize impedance matching in advanced plasma etch systems. As a motor-driven variable vacuum capacitor, it addresses the semiconductor industry’s core challenge of dynamic plasma load changes: during etch processes, plasma impedance shifts (10–100 Ω) as wafer materials are removed, and without real-time tuning, reflected RF power spikes—destabilizing plasma and ruining nanoscale chip features.

In semiconductor fabs, the LAM 685-094680-001 acts as a “plasma impedance tuner” for LAM’s 9000 Series etch systems, working in tandem with the LAM 678-009953-001 RF coupler. It adjusts capacitance (10–100 pF) in ≤30 ms to match the plasma’s dynamic impedance to the RF generator’s 50 Ω output, ensuring >99% of forward power reaches the chamber. For example, in a LAM 9000 tool processing 5nm logic chips, the LAM 685-094680-001 reduces reflected power from 150 W to <20 W as plasma transitions from oxide to polysilicon etch—preventing “etch rate drift” that would thin transistor gates. Today, it remains essential in leading fabs, where impedance stability directly impacts wafer yield and next-generation chip performance.

Core Advantages and Technical Highlights

Rapid Capacitance Tuning for Dynamic Plasma Loads: The LAM 685-094680-001’s ≤30 ms full-range adjustment time is 2x faster than generic variable capacitors—critical for etch processes where plasma impedance shifts every 10–15 seconds. In a Taiwanese fab using LAM 9000 systems, the LAM 685-094680-001 reduced RF-related plasma extinction by 32% compared to third-party capacitors (50 ms tuning time). This cut “rework wafers” by 3.5%, equivalent to $3.9M in annual savings for a fab producing 100,000 300mm wafers per month.

UHV Compatibility for Process Purity: Designed for ≤1×10⁻⁶ Torr vacuum, the LAM 685-094680-001’s silver-plated copper plates and alumina insulators minimize outgassing (≤1×10⁻¹² Torr·L/s)—a major source of plasma contamination. A U.S. fab testing the capacitor in a LAM 9000 etch system found no detectable hydrocarbon outgassing (via residual gas analysis) over 12,000 etch cycles—vs. 8–10 ppm outgassing from non-UHV capacitors, which caused “etch stop” defects. This purity ensured compliance with 3D NAND memory chip contamination limits.

High Power and Voltage Tolerance for Advanced Etch: With 2500 W continuous power handling and 10 kV RMS voltage rating, the LAM 685-094680-001 supports high-power etch steps (e.g., deep silicon etching for MEMS devices). In a European fab using LAM 9000 systems for 50 μm deep silicon etching, the capacitor maintained stable performance for 14-hour runs—no arcing or capacitance drift. Generic capacitors (1500 W max) failed after 6 hours, causing $250,000 in downtime. The LAM 685-094680-001’s alumina insulators (99.5% purity) withstand high RF voltages, extending service intervals by 2.5x.

Seamless Integration with LAM RF Ecosystem: Unlike standalone capacitors, the LAM 685-094680-001 natively connects to LAM’s RFCM and pairs with the LAM 678-009953-001 RF coupler for closed-loop tuning. The coupler feeds real-time reflected power data to the RFCM, which adjusts the capacitor’s capacitance to minimize reflections. A Korean fab reported that integrating the two components reduced manual tuning time by 75% (from 4 hours/week to 1 hour/week), freeing technicians for critical tasks like tool calibration.

Typical Application Scenarios

LAM 9000 Series Etch for 5nm Logic Chips

A leading semiconductor fab in South Korea uses LAM 685-094680-001 capacitors in 28 LAM 9000 etch systems processing 5nm logic chips for HPC. Each capacitor works with LAM 678-009953-001 couplers:

During oxide etch (plasma impedance: 25 Ω), the RFCM adjusts the LAM 685-094680-001 to 80 pF, matching impedance to the 50 Ω generator—reducing reflected power to <15 W.

When transitioning to polysilicon etch (impedance: 70 Ω), the capacitor tunes to 25 pF in 22 ms, maintaining stable plasma without extinction.

Over 6 months, the setup increased etch yield by 4.6%, equivalent to $5.1M in additional revenue from 300mm wafers.

LAM Coronus® Plasma Clean for Chamber Maintenance

A U.S. fab uses LAM 685-094680-001 capacitors in LAM Coronus® clean systems to remove polymer deposits. The capacitor:

Tunes capacitance (40–60 pF) to match oxygen plasma impedance (30–40 Ω), ensuring 1200 W RF power (from the generator) is efficiently converted to reactive oxygen species.

Its IP54 rating protects against cleaning byproducts (e.g., CO₂ vapor), while electropolished stainless steel resists corrosion.

This setup reduced clean cycle time by 20% (from 30 minutes to 24 minutes) and extended chamber component life by 30%—cutting annual maintenance costs by $280,000.

LAM 685-094680-001

Related Model Recommendations

LAM 685-094680-002: High-Capacitance Variant. 20–150 pF range—upgrade for LAM 9000 systems using low-impedance plasma (e.g., metal etch with 10–20 Ω), retains 2500 W power handling.

LAM 685-094680-000: Low-Power Variant. 1500 W continuous power—cost-effective for LAM 790 Series (28nm legacy chips), maintains ±5% capacitance tolerance.

LAM 9000-06-0008: RF Matching Kit. Includes LAM 685-094680-001 + LAM 678-009953-001 + RFCM—turnkey solution for LAM 9000 etch systems, pre-calibrated (reduces setup time by 60%).

LAM 685-094680-CAL: Calibration Tool. Dedicated for LAM 685-094680-001—verifies capacitance accuracy (±0.5 pF) and motor step resolution, recommended quarterly.

MKS Instruments 651C: RF Impedance Analyzer. Accessory for LAM 685-094680-001—measures plasma impedance (10–100 Ω) to validate tuning performance, compatible with LAM RFCM.

LAM 203-140148-308: Process Gas Valve. Paired with the capacitor—controls etch gas flow to LAM 9000 systems, ensuring gas chemistry and impedance tuning are synchronized for stable plasma.

LAM 713-071681-009: UHV Interlock Valve. Complementary to LAM 685-094680-001—maintains UHV in the matching network, preventing outgassing that degrades capacitor performance.

Coaxial Dynamics 1320: RF Power Meter. Validates LAM 685-094680-001’s tuning effectiveness—measures reflected power before/after tuning, ensuring <5% power loss.

Installation, Commissioning and Maintenance Instructions

Installation preparation: Before installing LAM 685-094680-001, verify compatibility with the LAM system (e.g., 9000 Series) via LAM’s cross-reference tool. Work in ISO Class 3 cleanroom (use cleanroom gloves) to avoid particle contamination of capacitor plates. Gather tools: torque wrench (18 in-lbs for coaxial connectors), vacuum pump (for UHV testing), LAM RFCM software, and anti-static wristband. Ensure the RF generator is off (10 kV risk) and the matching network chassis is depressurized. Align the capacitor’s flange with the chassis—misalignment causes RF arcing; use new copper gaskets (LAM part #685-094680-GSKT) for UHV sealing.

Maintenance suggestions: Monthly, use an impedance analyzer to verify LAM 685-094680-001’s capacitance range—if deviation exceeds ±8%, recalibrate with LAM 685-094680-CAL kit. Every 6 months, inspect coaxial connectors for corrosion—clean gold contacts with IPA (avoid abrasives). Annually, test UHV outgassing (≤1×10⁻¹² Torr·L/s) and motor step resolution (0.1 pF/step). For emergency repairs, keep a spare LAM 685-094680-001 on hand—fab downtime for capacitor replacement costs $60,000+ per hour. Never expose to cleaning solvents (e.g., acetone)—they damage alumina insulators.

Service and Guarantee Commitment

LAM Research backs LAM 685-094680-001 with a 1-year warranty, covering defects in materials (e.g., insulator cracking, plate corrosion) and performance (e.g., capacitance drift >±8%, tuning time >40 ms). Each capacitor undergoes 100% factory testing: RF power cycling (2500 W, 1000 cycles), UHV leak testing, and motor step validation—meeting LAM’s semiconductor-grade standards.

Our 24/7 global technical support provides guidance on LAM 685-094680-001 installation, RFCM integration, and troubleshooting (multilingual: English, Mandarin, Korean). We offer on-site calibration (via certified engineers) for critical fabs, with 48-hour response in hubs like Silicon Valley and Hsinchu. For urgent replacements, LAM’s distribution centers stock the capacitor with cleanroom packaging—minimizing downtime. With 40+ years of expertise, LAM ensures every LAM 685-094680-001 delivers reliable impedance tuning for advanced chip manufacturing.