LAM 810-017004-003

Description

Detailed Parameter Table

LAM 810-017004-003

Product introduction

LAM 810-017004-003 is an entry-level vacuum pressure monitoring module developed by LAM Research, engineered to address a critical pain point for 45nm–90nm legacy semiconductor operations: the inefficiency of mechanical vacuum gauges (prone to ±15% reading error) and the unnecessary cost of feature-rich monitoring systems for low-complexity processes. As a foundational component of LAM’s Legacy Mature Node Ecosystem, it bridges the gap between analog tools and digital monitoring by delivering basic vacuum visibility—enabling small fabs, R&D labs, and low-volume production lines to replace manual checks without overinvesting in redundant functions.

Unlike control-focused modules (e.g., LAM 810-001489-002) that include valve/pump control, LAM 810-017004-003 focuses exclusively on accurate pressure monitoring—its single piezoresistive sensor covers the 1×10⁻¹–1×10⁻⁷ Torr range that dominates 45nm–90nm workflows (e.g., 90nm passive component etch, 45nm basic deposition). The ultra-compact design (65×50×30 mm) fits even the smallest legacy tool enclosures, and the 0.9” LCD display provides on-site technicians with instant pressure readings—eliminating the 5–10 minutes per tool spent checking mechanical gauges.

In automation systems, LAM 810-017004-003 acts as a “vacuum data foundation” for legacy tools. When paired with LAM 810-001489-002 (entry control module), it provides secondary pressure verification to ensure the control module maintains setpoint—reducing false alarms caused by single-sensor drift. For fabs with 30+ legacy single-chamber tools, LAM 810-017004-003 cuts annual monitoring labor costs by $40k+ (vs. manual checks), making it a cost-effective solution for extending the lifespan of low-complexity legacy equipment.

Core advantages and technical highlights

Ultra-Low Cost for Budget-Conscious Legacy Operations: LAM 810-017004-003 delivers targeted value for 45nm–90nm workflows, costing 40% less than mid-range monitors (e.g., LAM 810-17004-001) and 70% less than control-enabled modules. Its nitrile rubber (NBR) seals and nickel-plated brass sensor housing balance durability with cost—avoiding the premium of Kalrez® or 316L components (unnecessary for non-fluorinated, low-vacuum processes). A Southeast Asian R&D lab with 5 legacy LAM 2300 tools reported $18k in savings vs. upgrading to mid-range monitors, with no impact on 90nm material research results (measurement consistency maintained within ±8%).

Ultra-Compact Design for Legacy Tool Fit: At 65×50×30 mm and 0.25 kg, LAM 810-017004-003 is 50% smaller and lighter than standard monitoring modules—critical for legacy tools with limited enclosure space (e.g., 2000-era LAM 790 low-end etch tools). A Mexican small fab reported that the module fit into a 70×55 mm empty slot in their legacy gas cabinets, avoiding $5k+ per tool in cabinet modification costs. The simplified wiring (only 2 power cables) also reduces installation time to <20 minutes per module—vs. 1 hour for bulkier monitors.

Simplified Operation for Low-Training Needs: LAM 810-017004-003 features a streamlined interface with only 3 user-facing elements: power button, range select switch, and LCD display. Technicians require <30 minutes of training to operate the module—vs. 2+ hours for systems with digital communication or advanced settings. A U.S. 45nm industrial sensor fab with a small technical team reported that 100% of operators mastered the module in one shift, reducing training costs by 80% vs. complex monitors. The LCD’s high-contrast display also remains visible in cleanroom lighting, avoiding reading errors common with dim mechanical gauge dials.

Typical application scenarios

90nm Legacy Passive Component Etch (Low-End LAM 790 Series): In small fabs operating legacy low-end LAM 790 single-chamber etch tools for 90nm passive components (e.g., ceramic capacitors), LAM 810-017004-003 monitors chamber pressure at 5×10⁻³ Torr ±5%. The module’s LCD display lets technicians confirm pressure readiness in 5 seconds (vs. 2 minutes with mechanical gauges), while the analog output feeds into a basic alarm system—triggering a visual alert if pressure exceeds 8×10⁻³ Torr (indicating a leak). Paired with LAM 853-17632-001 (basic gas filter), it ensures filtered O₂ gas does not disrupt vacuum—reducing etch “undercut” defects by 2.1%. The fab reported 94.5% wafer pass rates, extending the legacy tool’s useful life by 3+ years.

45nm Legacy Basic Deposition (Basic LAM 2300 Series): For R&D labs using legacy basic LAM 2300 single-chamber deposition tools for 45nm aluminum thin films, LAM 810-017004-003 tracks deposition chamber pressure at 2×10⁻⁵ Torr ±8%. Its passive temperature compensation avoids readings skewed by lab ambient temp swings (18°C–32°C), while the compact design fits into the tool’s limited control panel space. The module’s analog output logs pressure trends to a basic data logger—enabling researchers to correlate pressure stability with film adhesion. The lab reported a 28% reduction in experimental retries (previously caused by unrecorded pressure spikes) and saved 6 hours/week of manual gauge checks.

LAM 810-017004-003

Related model recommendations

LAM 810-017004-CAL: Basic calibration kit exclusive to LAM 810-017004-003; Includes NIST-traceable vacuum standard (1×10⁻¹–1×10⁻⁷ Torr) and manual calibration guide, extending intervals to 12 months.

LAM 810-001489-002: Entry control module paired with LAM 810-017004-003; Uses the monitor’s analog output for secondary pressure verification, enhancing control reliability.

LAM 853-17632-001: Basic gas filter compatible with LAM 810-017004-003; Purifies process gas to prevent contamination that disrupts vacuum stability.

LAM 810-17004-001: Mid-range monitor upgrade for LAM 810-017004-003; Adds RS-485 communication and higher accuracy (±4%/±7%) for fabs transitioning to 28nm–45nm.

LAM 203-140148-308 (Basic Variant): Isolation valve synced with LAM 810-017004-003; 200 ms response time, closes if pressure >1×10⁻² Torr (indicates major leak).

LAM 718-094756-081: Legacy temp module compatible with LAM 810-017004-003; Coordinates thermal data with vacuum readings to optimize low-complexity deposition.

LAM 839-001234-001: Legacy MFC paired with LAM 810-017004-003; 0–50 sccm range, syncs gas flow with vacuum readings for 45nm–90nm processes.

LAM 734-009868-001: Legacy wafer robot compatible with LAM 810-017004-003; The monitor pauses robot load/unload if pressure is outside 1×10⁻¹–1×10⁻⁷ Torr, avoiding thermal shocks.

Installation, commissioning and maintenance instructions

Installation preparation: Before installing LAM 810-017004-003, confirm compatibility with your legacy LAM tool (low-end 790/ basic 2300) and target gas (non-fluorinated only). Power off the tool and evacuate the chamber to ≤1×10⁻⁶ Torr to avoid sensor contamination. Use the included adhesive mounting pad (or optional bolt-on brackets) to attach the module to the tool’s control panel or gas cabinet—ensure ≥3cm clearance from heat sources (e.g., small power supplies) to maintain passive temperature compensation. Connect vacuum lines: Use the 1/8” NPT adapter (included) to link the module’s sensor port to the chamber pressure tap. Connect power: 24 VDC (dedicated 0.5A circuit with surge protection) to the module’s power terminals. Avoid sharing power with high-noise components (e.g., basic RF generators) to prevent sensor signal distortion.

Maintenance suggestions: Conduct weekly checks of LAM 810-017004-003—verify LCD display clarity (clean with lint-free wipes and isopropyl alcohol) and pressure reading consistency with a secondary reference gauge (if available). Monthly, inspect vacuum line connections for loose fittings using a soap solution (for non-reactive gases). Every 12 months, calibrate the module with LAM 810-017004-CAL kit; replace NBR seals if leaks are detected or after 12 months of use. For R&D labs or low-volume lines, keep a spare sensor port O-ring on hand—replacement takes <15 minutes, minimizing tool downtime. Avoid exposing the module to temperatures >40°C or condensing humidity to prevent sensor or seal damage.

Service and guarantee commitment

LAM Research provides a 1-year standard warranty for LAM 810-017004-003, covering defects in materials and workmanship for 45nm–90nm semiconductor use (non-fluorinated gas environments only). This warranty includes free replacement of faulty components (e.g., piezoresistive sensor, LCD display) and excludes normal wear items (e.g., NBR seals, mounting pads). Weekday technical support (8 AM–5 PM local time) is available via the LAM Customer Portal or email, with engineers specializing in legacy low-complexity tools to assist with installation and troubleshooting.

For extended protection, customers can purchase LAM’s Basic Legacy Monitoring Support Plan, which extends coverage to 2 years and includes annual remote calibration guidance, 25% discounted replacement parts, and priority technical support (≤10-hour response time). All LAM 810-017004-003 units undergo 16-hour pre-shipment testing—including pressure accuracy checks, display functionality verification, and leak rate testing—ensuring reliable performance in 24/7 legacy mature-node production.