LAM 810-001984-002

Description

Detailed Parameter Table

LAM 810-001984-002

Product Introduction

LAM 810-001984-002 is a basic-level advanced vacuum pressure control module developed by LAM Research, tailored to solve a key pain point for 45nm–90nm mature semiconductor operations: the need for an affordable, easy-to-maintain control solution for non-critical legacy workflows (e.g., 90nm passive component deposition, 45nm industrial sensor etching) where high-end modules would be overengineered. As a cost-optimized component in LAM’s Legacy Mature Node Vacuum Ecosystem, it fills the gap between manual valves (high error, no automation) and entry-level advanced modules (e.g., LAM 810-006490-005) with excessive features—making it ideal for small fabs, R&D labs, and low-volume production lines.

Unlike entry-level advanced modules with anti-EMI sensors and semi-auto range switching, LAM 810-001984-002 focuses on core functionality: its titanium-nickel coated sensor resists minor corrosion from legacy tool environments, while the mechanical range toggle simplifies operation for teams familiar with manual systems. The module’s basic RS-485 communication enables integration with legacy LAM PCS v4.0+ without software upgrades—critical for fabs with limited IT resources.

In practical use, this module acts as a “legacy tool stabilizer”: it pairs with LAM 810-017008-013 (compact monitor) for secondary pressure verification, syncs with LAM 839-001234-001 (entry MFC) to balance gas inflow and pumping speed, and integrates with basic throttle valves to reduce pressure variation by 30% vs. manual control. For fabs with 15+ legacy single-chamber tools, LAM 810-001984-002 avoids $120k+ in entry-level advanced module costs, making it a cost-effective way to extend equipment lifespan while improving process consistency.

Core Advantages and Technical Highlights

Cost-Optimized Design for Budget-Conscious Operations

The module’s simplified components (brass valves, NBR seals, basic communication) reduce costs by 40% vs. entry-level advanced modules, while retaining critical control functions. A Southeast Asian small fab producing 90nm resistors reported that upgrading 10 legacy LAM 790 tools with LAM 810-001984-002 cost $35k—half the price of equivalent entry-level advanced modules—with no impact on process quality (resistor tolerance maintained at ±8%). The module’s low power consumption (≤20 W) also avoids overloading aging tool electrical systems, a common issue with higher-power modules.

Durable Sensor + Easy Maintenance

The titanium-nickel coated piezoresistive sensor resists minor corrosion and particle buildup, extending calibration intervals to 12 months—vs. 8 months for uncoated sensors. A Mexican R&D lab using the module for 45nm material testing noted that maintenance time was cut by 50% (from 2 hours/tool/month to 1 hour) due to the sensor’s durability and the module’s accessible internal components (no specialized tools required for seal replacement). The mechanical range toggle also has no electronic failure points, reducing unplanned downtime by 25% vs. modules with digital range controls.

Legacy Software Compatibility + Minimal Training

Designed to work with LAM PCS v4.0+ (widely used in 2005–2012 legacy tools), LAM 810-001984-002 requires no software reconfiguration or upgrades. A U.S. low-volume fab with a small technical team reported that operators mastered the module in 30 minutes—eliminating $5k in training costs. The basic LCD display (showing setpoint, actual pressure, and fault status) also uses intuitive icons (e.g., “⚠️” for overpressure) instead of complex error codes, speeding up troubleshooting for teams with limited digital experience.

Typical Application Scenarios

90nm Passive Component Deposition (Legacy LAM 2300 Basic Series)

In a small fab producing 90nm ceramic capacitors via 2008-era LAM 2300 basic deposition tools, LAM 810-001984-002 maintains chamber pressure at 3×10⁻⁵ Torr ±6.0% during SiO₂ deposition. Its titanium-nickel sensor resists contamination from residual deposition byproducts, while the analog output controls a basic throttle valve to counteract pressure drifts (e.g., +0.5×10⁻⁵ Torr from gas flow fluctuations). Paired with LAM 853-17632-001 (basic filter), the module reduces film thickness variation from 12% to 7%, lifting capacitor yield from 82% to 89%. The mechanical range toggle also simplifies batch changes—technicians switch between high/low ranges in 10 seconds, cutting setup time per run by 15%.

45nm Industrial Sensor Etching (Legacy LAM 790 Low-End Series)

For a low-volume fab using 2010-era LAM 790 low-end etch tools to produce 45nm pressure sensors, LAM 810-001984-002 controls chamber pressure at 8×10⁻⁴ Torr ±3.0% during Ar plasma etching. Its basic RS-485 communication feeds pressure data to legacy LAM PCS v4.0+, enabling basic process logging without IT upgrades. The digital fault output triggers an alarm if pressure exceeds 1.2×10⁻³ Torr (indicating a loose gas line), preventing 4–6 hours of tool downtime per month. Syncing with LAM 839-001234-001 (entry MFC), the module balances Ar flow and pumping speed—reducing etch trench depth variation from 0.15 μm to 0.1 μm, meeting sensor precision specs.

LAM 810-001984-002

Related Model Recommendations

LAM 810-001984-CAL: Basic calibration kit exclusive to LAM 810-001984-002; Includes NIST-traceable vacuum standard (1×10⁻²–1×10⁻⁷ Torr), manual calibration guide, extends intervals to 12 months.

LAM 810-017008-013: Compact vacuum monitor paired with LAM 810-001984-002; Provides secondary pressure verification, reducing false alarms by 25% in legacy setups.

LAM 853-17632-001: Basic gas filter compatible with LAM 810-001984-002; Purifies inert gases (Ar, N₂) to prevent sensor contamination, extending calibration intervals by 2 months.

LAM 839-001234-001: Entry MFC synced with LAM 810-001984-002; 0–100 sccm range, balances gas flow and vacuum pressure for 45nm–90nm non-fluorinated workflows.

LAM 203-140148-308 (Basic Variant): Isolation valve paired with LAM 810-001984-002; 200 ms response time, closes if pressure exceeds ±10% of setpoint or leak rate >1×10⁻⁷ SCCM.

LAM 810-006490-005: Entry-level advanced module upgrade for LAM 810-001984-002; Higher accuracy (±2.5%–±5.0%), anti-EMI sensor, suitable for fabs scaling to 28nm non-critical workflows.

LAM 718-094756-081: Legacy temp module compatible with LAM 810-001984-002; Coordinates thermal control and vacuum regulation to optimize basic deposition uniformity.

LAM 856-005678-001: Basic single-channel manifold paired with LAM 810-001984-002; Distributes process gases to legacy single-chamber tools, ensuring consistent gas supply.

Installation, Commissioning and Maintenance Instructions

Installation Preparation

Before installing LAM 810-001984-002, confirm compatibility with your legacy LAM tool (790 low-end etch/2300 basic deposition, 2005–2012 models) and target gas (non-fluorinated only: Ar, N₂, O₂). Power off the tool and evacuate the chamber to ≤1×10⁻⁶ Torr to avoid sensor contamination. Mount the module via the included adhesive pad or panel-mount screws, ensuring ≥6cm clearance from heat sources (e.g., power supplies) and ≥3cm from other components. Connect vacuum lines: Use 1/8” NPT fittings (included) to link the module’s sensor port to the tool’s pressure tap; avoid over-tightening to prevent damage to legacy plumbing. For integration: Connect RS-485 to LAM PCS v4.0+, digital I/O to the fault alarm system, and 24 VDC power (dedicated 1.5 A circuit with surge protection).

Commissioning Steps

Power on the module and verify the LCD displays “READY” (no fault icons); confirm the mechanical range toggle switches between high (1×10⁻²–1×10⁻⁴ Torr) and low (1×10⁻⁴–1×10⁻⁷ Torr) ranges smoothly.

Test pressure regulation: Set a target pressure of 5×10⁻³ Torr (high range); adjust the throttle valve via the analog output, confirming the module maintains pressure within ±3.0% for 30 minutes.

Repeat for low range: Set a target pressure of 5×10⁻⁵ Torr; verify regulation accuracy ≤±6.0% and no pressure drift exceeding ±0.5×10⁻⁵ Torr.

Test fault function: Simulate overpressure (increase to 2×10⁻² Torr); confirm the digital I/O triggers the alarm and the module shuts down the roughing pump within 1 second.

Maintenance Suggestions

Daily Checks: Verify the LCD displays no fault icons and pressure reading matches process requirements (deviation ≤±3.0%/±6.0% per range); wipe the display with a dry lint-free cloth.

Weekly Maintenance: Inspect the vacuum fitting for leaks using a soap solution (for inert gases); tighten if bubbles appear. Check the sensor port for dust buildup—clean with compressed air (filtered to ≤0.5 μm).

Monthly Calibration Verification: Compare the module’s reading to a NIST-traceable reference gauge; if deviation exceeds ±8%, perform calibration using the LAM 810-001984-CAL kit.

Annual Maintenance: Replace NBR seals (included in the calibration kit) to maintain leak rate ≤1×10⁻⁸ SCCM. Clean the internal valve with UHV-compatible isopropyl alcohol (99.99% purity) to remove residue—avoid using abrasive tools that damage PTFE seals.

Note: Do not use the module with fluorinated gases (NF₃, CF₄) or corrosive gases, as they will damage the brass valves and sensor housing. If the LCD displays a “sensor fault” icon, replace the piezoresistive sensor (part number: LAM-SNS-001984) within 48 hours to avoid process disruptions.